Philip D. Rack |
UT office (865)
974-5344 ORNL office (865) 241-1598 fax (865) 974-4115 |
May 1997
Ph.D. Materials Science and Engineering,
Dissertation:
Optical Transitions in
Alkaline Earth Sulfide Electroluminescent Phosphors
Advisor:
Dr. Paul H. Holloway (GPA: 3.95/4.0)
June
1993
B.Sc. Materials Science and Engineering, Georgia Institute of
Technology,
PROFESSIONAL EXPERIENCE
8/05-present
Associate Professor
8/01-8/05
Assistant Professor
Department of Materials Science and Engineering, The
*
Teaching
Experience
Courses
9/98-8/01
Assistant Professor,
Department of Microelectronic Engineering, Rochester Institute of
Technology,
*
Research
areas include luminescent materials, thin film processing, thin film
characterization, and masking materials for optical lithography.
*
Teaching
Experience
EMCR 713 – Electronic Properties of Materials, EMCR 221 – Introduction to Microlithography (and laboratory), EMCR 643/703 – Thin Film Processes (and laboratory) EMCR 632/702 – Silicon Processes Laboratory (fabricate a vertical npn bipolar transistor)
Integrated Circuit Process Engineering Short Course
9/98-8/01
Advisory Scientist, Advanced Vision Technologies, Inc.
6/97-9/98
Senior Research and
Development Engineer, Advanced Vision Technologies, Inc.
*
Developed a high resolution field emission display.
Responsibilities included thin film materials research
(luminescent materials and field emitter materials), and
semiconductor device process development.
8/93-5/97
Graduate Research
Assistant (Dr. Paul H. Holloway - advisor), Materials Science
and Engineering,
*
Investigated thin film synthesis and characterization, and rare
earth and excitonic optical transitions in ZnS, SrS, and CaxSr1-xGa2S4
electroluminescent phosphors
1994
(summer)
Graduate Student Intern
(Dr. Sey-Shing Sun - supervisor), Planar Systems Inc.,
*
Deposited and evaluated thin film electroluminescent phosphors.
Responsibilities included complete device fabrication and
subsequent optical and electrical characterization.
AWARDS
AND HONORS
2009
University of Tennessee College of Engineering Research Fellow Award
2009
Department of Materials Science and Engineering Faculty Research
Award
2007
University of Tennessee College of Engineering Research Fellow Award
2006
2005
Best Poster Award:
Microscopy and Microanalysis National Meeting
2005
Best Poster Award: National Materials Research Society Spring
Meeting
2003
Ralph E. Powe Junior Faculty Achievement Award
2003
University of
2002
Georgia Institute of Technology Council of Outstanding Young
Engineering Alumni
1997 AVS
National Graduate Research Award
1995 MRS
National Graduate Student Award
1997 AVS
Graduate Student Poster Award
1995 AVS
Graduate Student Poster Award
1993
Graduated Magna Cum Laude
in Materials Science and Engineering, GIT
Nanofabrication and materials integration for advanced device
applications
Electrical and optical phenomena in semiconductors
Nanoscale focused electron and ion beam induced processing
Combinatorial thin film sythesis for rapid materials discovery
Materials characterization (XPS, AES, PL, SIMS, XRD, AFM, SEM)
1.
Philip
D. Rack,
Andrew J. Steckl and Jason C. Heikenfeld, “Inorganic
Electroluminescent Displays,” The Handbook of Luminescence and
Display Materials and Devices Edited by B.R. Vaddi and H.S.
Nalwa, American Scientific Publishers (2003).
2.
James M.
Fitz-Gerald, Philip D. Rack, Bradly Ringeisen, Daniel Young,
Rohit Modi, Ray Auyeung, Huey-Daw Wu,“Matrix Assisted Pulsed Laser
Evaporation Direct Write (MAPLE DW): A new Method to Rapidly
Prototype Organic and Inorganic Materials,”
Direct Write Technologies
for Rapid Prototyping Applications of Sensors, Electronics, and
Integrated Power Sources,
Edited by Alberto Piqué and Douglas B. Chrisey, Academic
Press (2002).
Invited
Review Articles
1.
Anatoli V Melechko, Ramya Desikan, Timothy E McKnight, Kate L Klein
and Philip D Rack,
Synthesis of Vertically
Aligned Carbon Nanofibers to Interface with Live Systems,
Journal of Physics D: Applied Physics Vol. 42
no. 19 Art. No:193001
(pp. 1-28) (October 2009).
2.
K.L.
Klein, A.V. Melechko, T.E. McKnight, J.D. Fowlkes, S.T.
Retterer, P.D. Rack, D.
Joy and M.L. Simpson, “Surface
Characterization and Functionalization of Carbon Nanofibers”
Applied Physics Reviews (Journal of Applied Physics)
103, 061301, pp. 1-26 (March 2008).
(Also selected for publication
for the March 31, 2008 issue of Virtual Journal of Nanoscale Science
& Technology.)
3.
Steven
J. Randolph, Jason D. Fowlkes, Philip D. Rack,
Focused, Nanoscale Electron-Beam-Induced Deposition and Etching,
Critical Reviews of Solid State and Materials Sciences, Vol. 31, p.
55-89 (October 2006)
4.
Philip
D. Rack
and Paul H. Holloway, The
Structure, Device Physics, and Materials Properties of Thin Film
Electroluminescent Displays, Materials Science and Engineering
Reports Volume R21, p171-220 (Jan. 1998).
5.
Philip
D. Rack,
Ananth Naman, Paul H. Holloway, Sey-Shing Sun, Richard T. Tuenge,
Materials Used in
Electroluminescent Displays, MRS Bulletin vol. 21 no. 3 p. 49-58
(March 1996).
1.
J. D.
Peak, C.L. Melcher, P.D.
Rack, Combinatorial thin
film sputtering investigation of
cerium concentration in Lu2SiO5 scintillators,
Journal of Luminescence (submitted September 2009).
2.
Qiang
Guo, Joo Hyon Noh, Peter K. Liaw,
Philip D. Rack, Yi Li,
Carl V. Thompson, Density
change upon crystallization in amorphous Zr-Cu-Al thin films,
Acta Materialia (submitted August 2009).
3.
Elena
Garlea, Hahn Choo, Gongyao Wang, Peter Liaw, Bjorn Clausen, Donald
Brown, Jungwon Park, Philip
D. Rack, and Edward Kenik,
Hydride-phase formation and
its influence on fatigue crack propagation behavior in a Zircaloy-4
alloy, Met Transactions (submitted August 2009).
4.
Jason
D. Fowlkes, Michael L. Simpson, Harry M. Meyer III, Hare Krishna,
Anatoli V. Melechko, Yueying Wu, Ramki Kalyanaraman, and
Philip D. Rack,
Bi-metallic functional
nanoparticle formation by laser–induced directed assembly of
patterned thin films, Nanotechnology (submitted August 2009).
5.
F.X. Liu, F.Q. Yang, Y.F. Gao, W.H. Jiang, Y. Guan, P.D. Rack, O.
Sergic, P.K. Liaw,
Micro-Scratch Study of a Zr-Based Metallic-Glass Film,
Surface and Coatings Technology Vol 203, no. 22 pp.3480-3484 (August
2009).
6.
Seyeoul
Kwon,
7.
8.
Jungwon
Park,
Seyeoul
Kwon, Seung Ik Jun, Timothy E. Mcknight,
Anatoli V. Melechko
Michael L. Simpson,
Manjeet Dhindsa, Jason D. Heikenfeld, and
Philip D. Rack,
Active Matrix Thin Film
Transistor Microelectrode Array Integrated with Vertically Aligned
Carbon Nanofibers, Electron Device Letters
Vol. 30, No. 3,
pp. 254-257 (March 2009).
9.
L. Kondic, J.A. Diez, P.D.
Rack, Y. Guan, J.D. Fowlkes,
Nanoparticle assembly via the dewetting of patterned thin metal
lines: Understanding the instability mechanisms,
Physical Review E
79 no 2,
026302 pp.1-7 (February 2009).
Also selected for publication
for the February 16, 2009 issue of Virtual Journal of Nanoscale
Science & Technology.
10.
Y.F.
Guan, J.D. Fowlkes, S.T. Retterer, M.L. Simpson,
P.D. Rack, Nanoscale
Lithography via Electron Beam Induced Deposition,
Nanotechnology 19 505302 pp.1-6
(Novemeber, 2008).
11.
Matthew G. Lassiter and
Philip D. Rack,
Nanoscale Electron Beam Induced Etching (EBIE): A Continuum Model
that Correlates the Etch Profile to the Experimental Parameters,
Nanotechnology
19 no. 45 455306 pp.1-14 (November 2008).
12.
Daryl A. Smith, Jason D. Fowlkes, Philip D. Rack,
Simulating the Effects of Surface Diffusion on Electron Beam Induced
Deposition via a Three Dimensional Monte Carlo Simulation,
Nanotechnology Vol. 19, no. 14, 415704 pp. 1-11 (October 2008).
13.
Daryl A. Smith, Jason D. Fowlkes, Philip D. Rack,
Understanding the Kinetics and Nanoscale Morphology of Electron Beam
Induced Deposition via a Three Dimensional Monte Carlo Simulation:
The Effects of the Precursor Molecule and the Deposited Material,
Small, Vol. 4, No. 9,
pp. 1382–1389 (September 2008).
14.
K. D. Sorge,K. L. Klein,A. V. Melechko, C. L. Finkel, O. Malkina,
Th.
Leventouri, J. D. Fowlkes,
P. D. Rack, M. L. Simpson,
Magnetic Properties of
Fe-Co Catalysts Used for Carbon
Nanofiber Synthesis,
Journal of Applied Physics Vol. 104 033909 pp. 1-7 (August 2008).
15.
Yingfeng Guan, Xingwu Wang, Yuandan Liu, Michael D. Potter, Korey D.
Sorge, Philip D. Rack,
Combinatorial synthesis and characterization of magnetic FexAl1-xON
thin films, Thin Solid Films vol. 516 pp. 6063-6070 (August
2008).
16.
Kate
L. Klein, Steven J. Randolph, Lawrence F.
Allard, Harry M. Meyer III, Michael L. Simpson,
and Philip D. Rack,
Single Crystal Nanowires
Grown Via Electron Beam Induced Deposition, Nanotechnology
19
345705 pp.1-8 (July 2008).
17.
P.D. Rack,
Y.F. Guan, J.D. FowlkesA.V. Melechko, M.L. Simpson,
Pulsed Laser Dewetting of
Patterned Thin Metal Films: A Means of Directed Assembly,
Applied Physics Letters, vol. 92 no. 22,
223108
pp.1-3 (June 2008).
18.
Jonathan D.
19.
Matthew G. Lassiter, Ted Liang,
Philip D. Rack,
Electron Beam Induced
Etching for Nanoscale Repair of Extreme Ultraviolet Lithography
Masks, Journal of Vacuum Science and Technology B, vol.
26 no. 3 pp. 963-967 (May-June 2008).
20.
Y.F.
Guan, R.C. Pearce, A.V. Melechko, D.K.
Hensley, M.L. Simpson,
P.D. Rack,
Pulsed laser de-wetting of
nickel catalyst for carbon nanofiber growth, Nanotechnology
19
235604 pp.1-4 (June 2008).
21.
Chang
K.
Choi, Chuck A. Hargraves,
Seung-Ik
Jun, Philip
D.
Rack,
Anthony E. English, Kenneth
D. Kihm,
Opto-Electric
Cellular Biosensor Using Optically Transparent Indium Tin Oxide
(ITO) Electrodes,
Sensors
8, 3257-3270 (May 2008).
22.
Philip D. Rack,
Jonathan D. Peak, Charles L. Melcher, James M. Fitz-Gerald,
Scanning electron and
cathodoluminescence imaging of thin filmn Lu2SiO5:Ce
scintillating materials,
Applied Physics Letters Vol. 91, No. 24, 244102 pp. 1-3
(December 2007).
23.
F. X. Liu, P. K. Liaw, W. H. Jiang, C. L. Chiang, Y. F. Gao, Y. F.
Guan, J. P. Chu, and P. D. Rack,
Fatigue-Resistance Enhancements by Glass-Forming Metallic Films,
Materials Science and Engineering:
A,
Volumes
468-470, 15
pp. 246-252 (November 2007).
24.
A.V. Melechko, K.L. Klein, J.D. Fowlkes, D. K. Hensley,
I. A. Merkulov, T. E. McKnight, P.D. Rack, J. A. Horton, M.
L. Simpson, Control of carbon nanostructure:
from nanofiber toward nanotube and back, Journal of Applied
Physics,
102,
074314, pp. 1-7 (October 2007).
25.
S.J. Randolph, J.D. Fowlkes, A. Melechko, K.L. Klein, H.M. Meyer,
III, M.L. Simpson, P.D. Rack,
Controlling thin film
structure for the dewetting of catalyst nanoparticle arrays for
subsequent carbon nanofiber growth,
Nanotechnology 18 (2007) 465304 pp.1-8.
26.
Philip D. Rack,
Jason D. Fowlkes, Steven J. Randolph,
In-situ probing of the growth
and morphology in electron-beam-induced deposited nanostructures,
Nanotechnology 18 (2007) 465602 pp.1-6.
27.
M. Zhang, Y. F. Zhang, P.D.
Rack, M.K. Miller, T.G. Nieh,
Nanocrystalline Tetragonal
Tantalum Thin Films, Scripta Materialia Vol. 57 pp. 1032–1035
(September 2007).
28.
Yuepeng
Deng, Yinfeng Guan, Jason D. Fowlkes, S.Q. Wen, George M. Pharr,
Fengxiao Liu, Peter K. Liaw, C.T. Liu, Philip D. Rack,
A combinatorial thin film sputtering approach for synthesizing and
characterizing ternary ZrCuAl metallic glasses,
Intermetallics Volume 15,
No. 9, pp. 1208-1216 (September 2007).
29.
B.J. Rodriguez, S. Jesse, K. Seal, A.P. Baddorf,
S.V. Kalinin, and P.
D. Rack, Fabrication,
Dynamics, and Electrical Properties of Insulated SPM Probes for
Electrical and Electromechanical Imaging in Liquids, Applied
Physics Letters, Vol.
91,
No. 9, 093130 pp.1-3 (August 2007). (*Also selected for publication
in the September 10, 2007 issue of Virtual Journal of Nanoscale
Science & Technology.)
30.
Yingfeng
Guan, Y.F. Guan Anatoli V. Melechko, Anthony J. Pedraza, Michael L.
Simpson, Philip D. Rack,
Non-Lithographic Organization
of Nickel Catalyst for Carbon Nanofiber Synthesis on Laser-Induced
Periodic Surface Structures, Nanotechnology
Vol. 18, No. 33
335306 pp. 1-7 (August 2007).
*Featured Article and image selected for Journal cover
31.
Young
R. Choi, Philip D. Rack, Bernard Frost, and David C. Joy,
Effect of Electron Beam-Induced Deposition and Etching Under Bias,
Scanning Vol. 29 No. 4 pp. 171-176 (July/August 2007).
32.
Daryl A.
Smith,
Jason D. Fowlkes, Philip D. Rack,
A Nanoscale Three – Dimensional Monte Carlo Simulation of Electron
Beam Induced Deposition with Gas Dynamics,
Nanotechnology
Vol. 18, No. 26
265308 pp. 1-14 (July 2007).
33.
Chang
K.
Choi, Anthony E. English,
Seung-Ik
Jun, Kenneth
D.
Kihm,
and
Philip
D.
Rack,
An
endothelial cell
compatible biosensor fabricated using optically thin
indium
tin oxide silicon nitride electrodes,
Biosensors and Bioelectronics
Vol. 22,
No. 11, 15, pp. 2585-2590
(May
2007).
34.
J.D.
Fowlkes, P.D. Rack, J.M. Fitz-Gerald, Ultraviolet emitting
(Y1-xGdx)2O3-z thin
films deposited by rf magnetron sputtering: structure – property –
thin film processing relationships, Thin Solid Films, Vol.
515 no. (7-8) pp. 3488-3498 (February 2007).
35.
T.
Leventouri, A. V. Melechko, K. D. Sorge, K. L. Klein, J. D. Fowlkes,
P. D. Rack, I. M. Anderson, J. R. Thompson, T. E. McKnight,
M. L. Simpson, Magnetic Alloys in Nanoscale Biomaterials,
Trans Met A, 37A, 3423-3427 (December 2006).
36.
Yuepeng Deng, Y. Guan, Philip D. Rack, Combinatorial
Synthesis and Parameter Optimization of Chromium-doped Yttrium
Aluminum Garnet Thin Film Sputtering, Thin Solid Films,
Vol. 515, no. 4, 5
pp. 1721-1726 (Dec 2006).
37.
Young R.
Choi, Philip D. Rack, Steven J. Randolph, Daryl A. Smith, and
David C. Joy,
Pressure effect of growing with electron beam induced deposition
with WF6 and TEOS precursor,
Scanning, Vol. 28 no. 6, pp. 3111-318, (December 2006) *image
selected for journal cover.
38.
Yuepeng
Deng, Jason D. Fowlkes, Philip D. Rack, James M. Fitz-Gerald,
Thin Film rf Magnetron Sputtering of Gadolinium Doped
Yttrium Aluminum Garnet Ultraviolet Emitting Materials,
Journal of Optical Materials Vol. 29 pp.183-191 (November 2006).
39.
Manjeet
S. Dhindsa, Neil R. Smith, and Jason Heikenfeld, Philip D. Rack,
Jason D. Fowlkes, Mitchel J. Doktycz, Anatoli V. Melechko, and
Micheal. L. Simpson, Electrostatically Induced Wetting of
Vertically Aligned Superhydrophobic Carbon Nanofibers, Langmuir
Vol 22 no. 21, pp. 9030-9034, (October 2006).
40.
Seung-Ik
Jun, Anatoli V. Melechko, Timothy E. Mcknight, Michael L. Simpson,
Philip D. Rack, Low Temperature Solid Phase
Crystallization of Amorphous Si Thin Films Deposited with RF
Magnetron Sputter Deposition with Substrate Bias, Applied
Physics Letters Vol 89, no. 2, p 22104-1-3 (July 2006).
41.
F.X.
Liu, P.K. Liaw, G.Y. Wang, C.L. Chiang, D.A. Smith, P.D. Rack,
J.P. Chu and R.A. Buchanan, Specimen-geometry effects on
mechanical behavior of metallic glasses, Intermetallics, Vol.
14, no. 8-9, pp. 1014-1018 (August-September 2006).
42. J.D. Fowlkes, P.D. Rack, J.M. Fitz-Gerald, Ultraviolet emitting (Y1-xGdx)2O3-z thin films deposited by rf magnetron sputtering: Combinatorial modeling, synthesis, and rapid characterization, Thin Solid Films, Vol. 510, no. 1-2, pp. 68-76 (July 2006).
43.
J.D.
Fowlkes, A.V. Melechko, K.L Klein, P.D. Rack, D.A. Smith,
D.K. Hensley, M.J. Doktycz, M.L. Simpson, Control of catalyst
particle crystallographic orientation in vertically aligned carbon
nanofiber synthesis, Carbon, Vol 44 no. 8, pp. 1503-1510 (July
2006).
44.
K.L.
Klein, A.V. Melechko, P.D. Rack, D.K.
Hensley, J.D. Fowlkes, H.M. Meyer III, L.F. Allard, T.E. McKnight,
M.L. Simpson, Formation of
Ultrasharp Vertically Aligned Cu-Si Nanocones by a DC Plasma Process,
Journal of Physical Chemistry B: Condensed Matter, Materials,
Surfaces, Interfaces & Biophysical Vol 110 no. (10) pp. 4766-4771
(March 2006).
45. J.D. Fowlkes, S.J. Randolph, P.D. Rack, Growth and Simulation of High – Aspect Ratio Nanopillars by Primary and Secondary Electron – Induced Deposition Journal of Vacuum Science and Technology B, Microelectronics and Nanometer Structures, Vol 23, no 6, pp 2825-2832 (November/December 2005).
46. E.D. Specht, P.D. Rack, A. Rar, G.M. Pharr, E.P. George, J.D. Fowlkes, H. Hong, and E. Karapetrova, Metastable Phase Evolution and Grain Growth in Annealed Nanocrystalline Cr-Fe-Ni Films, Thin Solid Films, Vol. 493, Iss. 1-2, pp. 307-312 (December 2005).
47. Seung-Ik Jun, Anatoli V. Melechko, Timothy E. Mcknight, Michael L. Simpson, Philip D. Rack, DC substrate bias effects on amorphous silicon sputter deposited films and integration and characterization of a sputter deposited thin film transistor array, Applied Physics Letters Vol. 87, No. 13, pp. 132108-1-3 (September 2005).
48.
K. L.
Klein, A. V. Melechko, P. D.
Rack, J.D. Fowlkes, H. M. Meyer, and M. L. Simpson, Cu-Ni
composition gradient for the catalytic synthesis of vertically
aligned carbon nanofibers, Carbon Vol. 43, Iss. 9, pp. 1857-1863
(August 2005) *image selected for journal cover.
49. S.J. Randolph, J.D. Fowlkes, P.D. Rack Focused electron beam-induced etching of silicon dioxide, Journal of Applied Physics Vol. 98 034902 pp. 1-6 (August 2005).
50.
Seung-Ik
Jun, Anatoli V. Melechko, Timothy E. Mcknight, Michael L. Simpson,
Philip D. Rack Characterization of reactively sputtered
silicon dioxide thin films for fully sputtered
metal-insulator-semiconductor switching devices, Electronics
Letters, Vol 41, Iss. 14, No. 07, pp. 59 – 60 (July
2005)
51.
S.J.
Randolph, J.D. Fowlkes, P.D. Rack Effects of heat
generation during electron beam induced deposition of nanostructures,
Journal of Applied Physics,
Vol. 97 124312 pp. 1-8 (June 2005).
52.
X. Yang, S.J. Randolph,
P.D.
Rack,
L.R. Baylor, H. Cui, W.L. Gardner, and M.L. Simpson, Integrated
tungsten nanofiber field emission cathodes selectively grown by
nanoscale electron beam-induced deposition, Applied Physics
Letters
Vol 86
No. 18 pp. 183106 1-3 (May 2005).
53. D.S Lee, A.J. Steckl, P.D. Rack, J.M. Fitz-Gerald, Cathodoluminescence and its Temperature Dependence in Tm-doped AlxGa1-xN Thin Films, Physica Status Solidi (c) Vol 2 No. 7 pp. 2765-2769 (May 2005).
54. Seung-Ik Jun, Philip D. Rack, Timothy E. Mcknight and Michael L. Simpson, A statistical parameter study of ITO (indium tin oxide) thin films deposited by RF sputtering, Thin Solid Films Vol 476 No. 1 pp. 59-64 (April 2005).
55. Steven J. Randolph, Mark D. Hale, Michael A. Guillorn, Michael L. Simpson, Philip D. Rack, In-Situ Micro Vacuum-Encapsulation Process for a Carbon Nanofiber-Based Field Emission Diode, Microelectronic Engineering, Vol. 77 pp. 412-419 (April 2005).
56.
Seung-Ik
Jun, Anatoli V. Melechko, Timothy E. Mcknight, Michael L. Simpson,
Philip D. Rack, Electrical and microstructural
characterization of molybenum tungsten electrodes using a
combinatorial thin film sputtering technique, Journal of Applied
Physics Vol. 97 059046 pp. 1-6 (March 2005).
57. Yuepeng Deng, Jason D. Fowlkes, James M. Fitz-Gerald, Philip D. Rack, Combinatorial Thin Film Synthesis of Gd-doped Y3Al5O12 Ultraviolet Emitting Materials, Applied Physics A. 80 no. 4, pp. 787-789 (February 2005).
58. A. Rar, J. Frafjord, Jason D. Fowlkes, E. D. Specht, P. D. Rack, M. L. Santella, E.P. George, and G. M. Pharr, PVD Synthesis and High-Throughput Property Characterization of Ni- Fe- Cr Alloy Libraries, Journal of Measurement Science & Technology, Vol 16, pp. 46-53 (January 2005).
59. L.R. Baylor, W.L. Gardner, X. Yang, R.J. Kasica, M.A. Guillorn, B. Blalock, D.K. Hensley, S. Islam, D.H. Lowndes, A.V. Melechko, V.I. Merkulov, D.C. Joy, P. D. Rack, M.L. Simpson, D. K. Thomas, Initial Lithography Results from the Digital Electrostatic e-beam Array Lithography (DEAL) Concept, Journal of Vacuum Science and Technology B, vol. 22 no. (6) pp. 3021-3024 (Nov/Dec 2004).
60. J.M Fitz-Gerald, J. Hoekstra, J.D. Fowlkes, P.D. Rack, Pulsed Laser Deposited Ultraviolet Emitting SrS:Te Thin Films, Applied Physics Letters vol. 82, no.20, pp. 3466-3468 (May 2003).
61. Philip D. Rack, Steven Randolph, Yuepeng Deng, Jason Fowlkes, Young Choi and David C. Joy, Nanonscale Electron Beam Stimulated Processing, Applied Physics Letters, vol. 82, no.14, pp. 2326-2328 (April 2003). (*also selected for publication in the April 14, 2003 issue of the Virtual Journal of Nanoscale Science & Technology).
62. Philip D. Rack, Matthew Lassiter, Anatoli Bourov, Dennis Baiko, and Bruce Smith, “Optical Properties of Thin Film CrxNy-CrOxNy Multilayer Films for 157nm Optical Lithography” Journal of Vacuum Science and Techology B, vol. 21 no. (2) pp. 814-817 (March/April 2003).
63. Yong Eui Lee, David P. Norton, John D. Budai, Philip D. Rack, Jeffrey Peterson, and Michael D. Potter, Improvement of Photo- and Low-Voltage Cathodoluminescence in Lithium Zinc Gallate Blue and Green Thin-Film Phosphors, Journal of Applied Physics vol. 91, no. 5, p. 2974-2977 (March 2002).
64. Philip D. Rack, Jeffrey J. Peterson, Michael D. Potter, Wounjhang Park, Eu+3 and Cr+3 Doping for Red Cathodoluminescence in ZnGa2O4, Journal of Materials Research vol.16, no.5 p. 1429-33 (May 2001).
65. Philip D. Rack, Jeffrey J. Petterson, Jie Li, H.J. Rack, A.G. Geiculescu, Thin Film Growth of Reactive Sputter Deposited Tungsten-Carbon Thin Films, Journal of Vacuum Science and Technology A, vol.19, no.1 p. 62-65 (January 2001).
66. Caroline A. Kondoleon, Philip D. Rack, Eric Lambers, Paul Holloway, Carbon Deposition During Electron Beam Degradation of Ta2Zn3O8 Thin Film Phosphors, Journal of Vacuum Science and Technology A, vol.18, no.6 p. 2699-2705 (Nov. 2000).
67. Yong Eui Lee, David P. Norton, John D. Budai, Philip D. Rack, and Michael D. Potter, Photo- and Cathodoluminescence Characteristics of Blue Light Emitting Epitaxial Sr2CeO4 Thin Film Phosphors, Applied Physics Letters, Volume 77, No. 5, p678-680 (Aug 2000).
68. Santosh K. Kurinec, Philip D. Rack, Michael D. Potter, Thomas N. Blanton, Unit Cell Indexing of Luminescent Tantalum Zinc Oxide, Journal of Materials Research Volume 15 No. 6, p1320-1323 (June 2000).
69.
J.M. Fitzgerald,
P.D. Rack, R.C.Y.
Auyeung, A. Pique, M Zeleznik, and D.B. Chrisey,
Novel Laser Direct Writing of
Phosphor Screens for High Definition Flat Panel Displays,
Applied Physics Letters Volume 76 (11), p1386-1388 (March 2000).
70.
Ted A Obrien,
Philip D. Rack, Paul H.
Holloway and Michael C. Zerner,
Semiempirical Self Consistent
Field Modeling of Ce+3 4f and 5d Energy Levels in
Oxygen-doped Ca0.5Sr0.5 Ga2S4,
Journal of the Electrochemical Society, Volume 147 (2) p792-795
(Feb. 2000).
71. Philip D. Rack, Ted A O’Brien, Michael C. Zerner, Paul H. Holloway, Determination of the Ce+3 bonding in the Ca0.5Sr0.5Ga2S4:Ce Phosphor Via X-ray Photoelectron Spectroscopy, Journal of Applied Physics, Volume 86, No. 5, p2377-2384 (Sept. 1, 1999).
72. Philip D. Rack, Michael D. Potter, Andrew Woodard and Santosh Kurinec, Negative Ion Re-sputtering in Ta2Zn3O8 Thin Films, Journal of Vacuum Science and Technology A, Volume 17 Issue 5, p2805-2810 (Sept. 1999).
73. J. M. Fitzgerald, P. D. Rack, Troy A. Trottier, M. Ollinger, S. J. Pennycook, H. Gao, and R. K. Singh, Synthesis of Spherical Luminescent Particulate Coatings, Journal of Applied Physics – Communications, Volume 86 No. 3, p1759-1761 (Aug. 1, 1999).
74. Philip D. Rack, Michael D. Potter, Santosh Kurinec, Wounjhang Park, Brent K. Wagner, John Penczek, and Christopher J. Summers, Luminescence Properties of Ta2Zn3O8 and Mn-Doped Ta2Zn3O8, Journal of Applied Physics, Volume 84 No. 8, p4466-4470 (Oct. 15, 1998).
75. Philip D. Rack, Paul H. Holloway, Won Park, Brent K. Wagner, and Christopher J. Summers, Bound Exciton Luminescence in Te-Doped SrS, Journal of Applied Physics Volume 84 No. 7, p3676-3683 (Oct 1, 1998).
76. Jay S. Lewis, Philip D. Rack, Paul H. Holloway, Photoluminescence and Thermal Quenching of Bound Excitons in (BaS)1-x(SrTe)x, Journal of Crystal Growth, Volume 184/185, p1175-1179 (Feb. 1998).
77. Ted A O’Brien, Philip D. Rack, Paul H. Holloway, and Michael C. Zerner, Crystal Field and Molecular Orbital Calculations of the Optical Transitions in Ce Doped Alkaline Earth Sulfide (MgS, CaS, SrS, and BaS) Phosphors, Journal of Luminescence, Volume 78, p245-257 (June 1998).
78. Victor Sosa, Philip D. Rack, and Paul H. Holloway, X-ray Photoelectron Spectroscopy Valence Band Data for ZnS, SrS, and Sr0.45,Ca0.55Ga2S4:Ce Luminescent Thin Films, Journal of Vacuum Science and Technology A, Volume 18, No. 2, p393-396 (Mar/Apr 1998).
79. Mark R. Davidson, Balu Pathangey, Paul H. Holloway, Philip D. Rack, S.-S. Sun C.N. King, Sputter Deposition of Phosphors for Electroluminescent Flat Panel Displays, Journal of Electronic Materials Volume 26 No.11 p.1355-1360 (Dec. 1997).
80. W.L. Warren, K. Vanheusden, M.A. Rodriquez, C.H. Seager, D.R. Tallant, P. Rack, P.H. Holloway, B. Wagner, C.J. Summers, P.N.Yocom, Luminescence, Absorption, and Site Symmetry of Ce Activated SrGa2S4 Phosphors, Applied Physics Letters, vol. 70 no.4 p. 478-480 (Jan. 1997).
81. Philip D. Rack, Paul Holloway and Sey-Shing Sun, Variations in the Ce Radiative Transition by Oxygen Doping in the Ca0.55Sr0.45Ga2S4:Ce Blue Electroluminescent Phosphor, Society for Information Display Journal Vol. 4 No. 4 p. 281-286 (Nov. 1996).
1.
K.
Yang, C.L. Melcher, P.D. Rack, L. Eriksson,
Effects of Calcium Co-doping on Charge Traps
in LSO Crystals, Nuclear Science Symposium
and
Medical Imaging Conference 2007.
2.
Daryl A.
Smith,
Jason D. Fowlkes, Ted A. Liang, Philip D. Rack,
Understanding the growth mechanisms of electron beam induced
deposition via a Monte – Carlo based, 3D growth simulation,
2006 6th IEEE Conference on Nanotechnology Proceedings.
3.
M.
Dhindsa, N. Smith, J. Heikenfeld, J. Fowlkes, P.D. Rack, M.
J. Doktycz, A. V. Melechko, and M. L. Simpson, Electrowetting on
Arrayed Carbon Nanofibers, Proc. 2006 IEEE Conference on
Nanotechnology, P5-2, pp. 4-7, 2006.
4.
Manjeet
S. Dhindsa, Neil R. Smith, and Jason Heikenfeld, Philip D. Rack,
Jason D. Fowlkes, Mitchel J. Doktycz, Anatoli V. Melechko, and
Micheal. L. Simpson,
Electrostatically Induced Wetting of Vertically Aligned
Superhydrophobic Carbon Nanofibers,
2006 6th IEEE Conference on Nanotechnology Proceedings.
5.
Th.
Leventouri, A. V. Melechko, K. D. Sorge, K. L. Klein, J.
D. Fowlkes, P. D. Rack, I. M. Anderson, J. R. Thompson, T. E.
McKnight, M. L. Simpson, “Magnetic Alloys in Nanoscale
Biomaterials” Proceedings of the Fourth International Alloys
Conference (2005).
6.
Seung-Ik
Jun, Anatoli V. Melechko, Timothy E. Mcknight, Michael L. Simpson,
Philip D. Rack “Fabrication
and characterization of an active matrix thin film transistor array
for intracellular probing”
Proceedings of the Materials Research Society Spring Meeting, Vol
873-E pp. 9.21.1-6 (2005).
7.
T.E.
Mcknight, A.V. Melechko, G.D. Griffin, S-I. Jun, P.D. Rack, M.A.
Guillorn, V.I. Merkelov, M.L. Simpson, Optically and Electrically
Adressed Carbon Nanofiber Electrode Arrays for Intracellular
Interfacing, SPIE Proceedings 5588: Smart Medical and Biomedical
Sensor Technology II, p. 128-135 (2004).
8.
E.D.
Specht, P.D. Rack, G.M. Pharr, E.P. George, H. Hong,
Nonequilibrium Structures in Co-deposited Cr-Fe-Ni Films,
Proceedings of the Combinatorial and
Artificial Intelligence Methods in Materials Science II Symposium
Vol. 804, pp. 45-50 (2004).
9.
D.S
Lee,. A.J. Steckl, U. Hommerich, E.E. Nyein, P.D. Rack, J.
Fitzgerald, J.M. Zavada, Enhanced Blue
Emission From Tm-doped AlxGa1-xN
Electroluminescent Thin Films
International Semiconductor Device Research Symposium IEEE,
No.03EX741 p.5-6 (2003).
10.
Jason D.
Fowlkes, Philip D. Rack, Raj Bansal, James M. Fitz-Gerald,
Cathodoluminescence Study of Gadolinium–Doped Yttrium Oxide Thin
Films Deposited By Radio–Frequency Magnetron Sputtering,
Proceedings of the New Applications for Wide Bandgap Semiconductors
Symposium of the Materials Research Society Spring Meeting, Vol.
764, C7.12 (2003).
11.
James M.
Fitz-Gerald, Jeff Hoekstra, Raj Bansal, Jason D. Fowlkes, Philip
D. Rack, Temperature Dependent Cathodoluminescence
Characterization of Ultraviolet Emitting Films Grown by Pulsed Laser
Deposition, Proceedings of the Advanced Optical Processing of
Materials Symposium of the Materials Research Society Spring Meeting
Volume 780, p. 15-20 (2003).
12.
Philip
D. Rack,
Alexander Thesen, Stephen Randolph, Jason Fowlkes, David C. Joy,
Soft Electron Beam Etching for Precision TEM Sample Preparation,
SPIE Microlithography 2003: Metrology, Inspection, and Process
Control for Microlithography XVII, Volume 5038 paper #113 (August
2003).
13.
James M.
Fitz-Gerald, Jeffrey G. Hoekstra, Jason D. Fowlkes, Philip D Rack,
Ultraviolet Emitting SrS:Te Thin Films, MRS Proceedings of
the Progress in Semiconductor Materials II - Electronic and
Optoelectronic Applications Vol 744, p. M4.1.1-M4.1.12 (April 2003).
14.
Bruce W.
Smith, Geert Vandenberghe, Patrick Martin, Philip Rack,
Stephen Hsu, J. Fung Chen, James Wood, Gray Bar Masking:
Fabrication and Imaging for 193nm, Proceedings of the SPIE 21st
Annual Symposium on Photomask Technology.
15.
P.D. Rack,
J.M. Fitz-Gerald, A.C. Geiculescu, H.J. Rack, A. Piqué, R.C.Y.
Auyeung, and D.B. Chrisey,
Deposition of Ceramic Materials Using Powder and Precursor Vehicles
via Direct Write Processing,
Proceedings of the Materials for Direct Write Symposium of the
Materials Research Society Spring Meeting, Volume 624, pp. 29-34
(2000).
16.
Yong Eui
Lee, David P. Norton, John D. Budai, Miyoung Kim, Stephen Pennycook,
Philip D. Rack, and Michael D. Potter, Epitaxial Oxide
Thin Film Phosphors for Low Voltage FED Applications,
Proceedings of the Electron Emissive, Vacuum Microelectronics, and
Flat Panel Display Materials Symposium of the Materials Research
Society Spring Meeting Volume 621, p.Q2.4.1-6 (2000).
17.
Philip
D. Rack,
Ted A O’Brien, Michael C. Zerner, Paul H. Holloway,
Semiempirical Self Consistent
Field Modeling of the Ce+3 4f and 5d Energy Levels in
Solid State Luminescent Materials, Proceedings of the Optical
Properties of Materials Syposium at the Materials Research Society
Fall Meeting, Vol. 579 p. 221-229 (Nov. 1999).
18.
Philip
D. Rack,
Michael D. Potter, Andrew Woodard and Santosh Kurinec, Sputtering
Luminescent Ta2Zn3O8 Thin Films,
Proceedings of the Luminescent Materials Symposium of the Materials
Research Society Spring Meeting, Volume 560, eds. J. McKittrick, B.
Di Bartolo, K. Mishra, p. 75-82 (April 1999).
19.
Paul H.
Holloway, Sean Jones, Philip
Rack, Joseph Sebastian, and Troy Trottier,
Flat Panel
Displays: How Bright and
Colorful is the Future?, Proceedings of the Tenth International
Symposium on the Applications of Ferroelectrics, vol. 1 p. 127-133
(August 1996).
20.
Paul H.
Holloway, J.-E. Yu, Philip
Rack, Joseph Sebastian, Sean Jones, Troy Trottier, K.S. Jones,
B. Pathangey, T.J. Anderson, S.-S. Sun, R.T. Tuenge, E. Dickey, and
C. N. King,
Blue and Yellow Light
Emitting Phosphors for Thin Film Electroluminescent Displays,
MRS Proceedings Vol. 345 (1994).
1.
Philip
D. Rack,
Paul Holloway, Sey-Shing Sun, Eric R. Dickey, Christian F. Schaus,
Richard T. Tuenge, and Christopher N. King,
TFEL Device with Injection
Layer, US Patent # 5,581,150.
2.
Kofi
Korsah, Larry Baylor, John Caughman,
Philip D. Rack, Ilia
Ivanov, Roger Kisna,
Doped Carbon Nanostructure Field
Emitter Arrays for Infrared Imaging.
Patent Pending (applied for 9/07)
1.
J.M.
Fitz-Gerald, P.D. Rack, “Use of Pulsed Laser Deposition to
Deposit Tellurium-Doped Thin Films”, Technical Insights Alert,
Copyright 2003 Frost & Sullivan ISSN 0896-422X, August 29, 2003.
Research and Scholarly Presentations
(*lead
presenter was PDR or PDR group member)
1.
*J.D. Fowlkes, D.A.
Smith, M.G. Lassiter, P.D. Rack, Electron Beam Induced Processing:
Fundamentals, Challenges, and Nanobio Applications, Microscopy and
Microanalysis International Meeting, Richmond VA (August 11-15,
2009).
2.
*J.D. Fowlkes, D.A.
Smith, M. Doktycz, M.L Simpson, P.D. Rack, Electron Beam Induced
Processing, Experimentation, Simulation and Applications, Microscopy
and Microanalysis International Meeting,
3.
*Philip D. Rack,
Overview of FEBIP
Simulation, Experimentation and Recent Applications, Second
International Workshop on Focused Electron Beam Induced Processing,
Thun Switzerland (October 7-8, 2008).
4.
*Philip D. Rack,
Electron Beam Induced Processing: Experimentation, Simulation and
Applications, FEI Inc., Hillboro OR, (October 15, 2007).
5.
*Philip D.
Rack,
Electron Beam Induced Processing: Experimentation, Simulation and
Applications, Clemson University Department of Materials Science and
Engineering (September 6, 2007)
6.
* Philip D.
Rack,
Understanding Electron-Beam-Induced Deposition and Etching via a
Monte Carlo Based, 3D Growth Simulation with Gas Dynamics, Philip D.
Rack, Daryl Smith, Jason D. Fowlkes, Microscopy and Microanalysis
International Meeting,
7.
*Device Fabrication of Active Matrix Thin Film Transistor Array ofr
Intracellular (and Extracellular) Probing, dpix Corporation,
8.
*Nanofabrication for interfacing and mimicking live cells AND
Nanoscale Remanufacturing, Society for Manufacturing Engineers --
The Next Industrial Revolution: Nanotechnology & Manufacturing,
*Understanding
electron-beam-induced deposition and etching via a Monte – Carlo
based, 3D growth simulation: “Envizion”, 1st
International Workshop on Electron Beam Induced Depostion,
10.
Selective Electron Beam Erosion and Deposition of Materials,
Microscopy and Microanalysis 2005,
11.
*Electron-solid, electron-gas, and gas-solid interactions during
electron microscopy and spectroscopy:
artifacts and nanoscale materials manipulation,
2004 Joint Florida Chapter Symposium of
the American Vacuum Society and the Microscopy and Microanalysis
Society, Orlando Florida (March 15, 2005)
12.
Control of Nanofiber Synthesis by Catalyst Particle Crystal
Structure, Orientation and Faceting,
Symposium KK:
Kinetics-Driven Nanopatterning on Surfaces,
Fall Materials Research Society Conference,
13.
*Combinatorial RF Magnetron Sputtering for Rapid Materials
Discovery: Methodology and Applications,
Microscopy and Microanalysis 2004,
*Focused Electron Beam Stimulated Nanoscale Direct Write, 2004 Joint Florida Chapter Symposium of the American Vacuum Society and the Microscopy and Microanalysis Society, Orlando Florida (March 8, 2004).
*Focused Electron Beam Stimulated Nanoscale Direct Write, DARPA Massively Reconfigurable Microfabrication Tools DARPA/MTO Workshop, Napa CA (October 28-30, 2003).
17.
18.
*Focused Nanoscale Electron Stimulated
Processing, KLA-Tencor,
19.
*Materials Research and Device Properties of
Field Emission Displays, Electrical and Computer Engineering
Department, The
20.
Ultraviolet Emitting SrS:Te Thin Films,
Symposium M: Progress in Semiconductor Materials II - Electronic and
Optoelectronic Applications, Fall Materials Research Society
Conference,
21.
*Field Emission Display Technology, XI
International Materials Research Congress, Cancun
22.
*Thin Film Processing and Materials Research
for Emerging Flat Panel Display Technologies, The
23. *The Material Properties, Device Mechanisms and Thin Film Processing of a Novel Field Emission Display, New England Chapter of the American Vacuum Society (June 2001).
24. *Thin Film Processing and Materials Research for Emerging Flat Panel Display Technologies, The Department of Materials Science and Engineering, The University of Tennessee (April 2001).
25.
*Field Emission Display Materials and
Devices, Nanoelectronics Laboratory,
26. *Thin Film Processing and Materials Research for Emerging Flat Panel Display Technologies, Department of Materials Science and Engineering, Virginia Polytechnic Institute and State University, (April 2000).
27.
*The Material Properties and Device
Mechanisms of Thin Film Electroluminescent Displays, Nanoelectronics
Laboratory,
28. *The Material Properties, Device Mechanisms, and Thin Film Processing of a Novel Field Emission Display, Surface Modification Branch of the Naval Research Laboratory (Oct. 1999).
29.
*Field
Emission Display Materials and Devices, Imaging ’99 AVS-MRS-ACS-EDS
Joint Chapter Symposium (June 1999).
30.
*Flat
Panel Display Technologies, 16th Annual Microelectronic
Engineering Conference, (May 1998).
31.
*Materials Properties and Device Mechanisms of Thin Film
Electroluminescent Displays, 17th Annual Symposium of the
East Tennnessee Chapter of the Materials Research Society (May
1997).
Contributed
(*lead presenter was PDR or PDR group member)
1.
*S.
Kwon, J. Park and P.D. Rack,
M. Dhindsa J.C.
Heikenfeld, A.V. Melechko, “The Fabrication and characterization of
electrically addressable microfluidic electrowetting channels”
53rd
International Conference on Electron, Ion, and Photon Beam
Technology and Nanofabrication, San Marco Florida (May 26-29, 2009).
2.
*Philip Rack,
Herschel Marchman, Jason Fowlkes,
Thomas
Moore, and Cheryl Hartfield,
“Optical
Imaging and Processing in aFIB/SEM: The Three Beam System”
53rd
International Conference on Electron, Ion, and Photon Beam
Technology and Nanofabrication, San Marco Florida (May 26-29, 2009).
3.
Jason
D. Fowlkes, Lou Kondic, Javier A. Diaz, Anatoli V. Melechko, Ramki
Kalyanaraman, Hare Krishna, Yueying Wu, and Philip D. Rack “Directed,
Liquid Phase Assembly of Patterned and Thin Metallic Films by Pulsed
Laser Dewetting” 53rd
International Conference on Electron, Ion, and Photon Beam
Technology and Nanofabrication, San Marco Florida (May 26-29, 2009).
4.
*S.
Kwon, J. Park and P.D. Rack,
M. Dhindsa J.C.
Heikenfeld, A.V. Melechko, “The Fabrication and characterization of
electrically addressable microfluidic electrowetting channels” Fall
Materials Research Society, Boston MA (December 1-5, 2008).
5.
*Y.F.
Guan, A.V. Melechko, J.D. Fowlkes, M.L. Simpson, P.D. Rack,
“Pulsed Laser Dewetting of Patterned Thin
Metal Films: A Means of Directed Assembly”55th
International AVS Conference,
6.
*Y.F.
Guan, J.D. Fowlkes, S.T. Retterer, M.L. Simpson, P.D. Rack “Nanoscale
Lithography via Electron Beam Induced Deposition”
52nd International Conference on Electron, Ion,
and Photon Beam Technology and Nanofabrication,
7.
*Matthew G. Lassiter and Philip D. Rack, Nanoscale
Electron Beam Induced Etching (EBIE): A Continuum Model that
Correlates the Etch Profile to the Experimental Parameters,
52nd
International Conference on Electron, Ion, and Photon Beam
Technology and Nanofabrication,
8. B. J. Rodriguez, K. Seal, S. Jesse, A. P. Baddorf, P. D. Rack, and S. V. Kalinin “Piezoresponse Force Microscopy in Liquid Environments: Novel Opportunities for Ferroelectric Imaging,” Symposium K: Ferroelectrics and Multiferroics with New Functionality Fall Materials Research Society International Meeting (November 26-30, 2007).
9.
*Y.F. Guan, A.V. Melechko, A.J. Pedraza,
M.L. Simpson, P.D. Rack. “Non-Lithographic Organization of Nickel
Catalyst for Carbon Nanofiber Synthesis on Laser-Induced Periodic
Surface Structures”, 54th
International AVS Conference,
10.
*P. D. Rack, B. J. Rodriguez,
K. Seal, S. Jesse, A. P. Baddorf, and S. V. Kalinin
“Fabrication, dynamics, and electrical properties of shielded probes
for piezoelectric force microscopy,”
54th
International AVS Conference,
11.
*Matthew G. Lassiter, Daryl
Smith, Ted Liang, Philip D. Rack, “Nanoscale electron beam induced
processing,” 54th
International AVS Conference,
12.
*J. Peak, C. Melcher, P.D.
Rack, “Combinatorial Synthesis of Thin Film Scintillation
Materials,” 54th International AVS Conference,
13.
*J. Park,
14.
*Y.F. Guan, A.V. Melechko, A.J.
Pedraza, L.R. Baylor, P.D. Rack.
“Maskless Synthesis of
Vertically Aligned Carbon Nanofibers (VACNF) Field Emission Arrays
on a Laser-Induced Periodic Surface Structures (LIPSS) Template,”
IVNC 2007 Meeting,
15.
L.R. Baylor, W.L. Gardner, S.J.
Randolph, Y.F. Guan, P.D. Rack, J.A. Moore, and M.N. Ericson
“Operation of the Digital Electrostatic e-beam Array Lithography
(DEAL) Prototype with Dose Control,” IVNC 2007 Meeting,
Chicago, IL July 2007.
16.
*Jonathan D. Peak, Charles L. Melcher, Philip D. Rack,
Combinatorial thin film synthesis
of scintillation
materials, 9th International Conference on
Inorganic Scinitillators and Their Applications, Winston-Salem NC
(June 4-8, 2007).
17. *Matthew G. Lassiter, Ted Liang, Philip D. Rack, Surface Chemistry Modifications for Improved Electron-Beam Induced Etching (EBIE) Processes, 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, Denver, CO (May 29-June 1, 2007).
18.
*Daryl A. Smith, Ted Liang,
Jason D. Fowlkes, Philip D. Rack,
Effects of energy and gas dynamics on the growth morphology and
kinetics of electron beam induced deposition via a Monte – Carlo
based, 3D simulation,
51st International Conference on Electron, Ion, and
Photon Beam Technology and Nanofabrication, Denver, CO (May 29-June
1, 2007).
19. O. Malkina, C. Finkel, K.D. Sorge, T. Leventouri, K.L. Klein, A.V. Melechko, J.D. Fowlkes, P.D. Rack, and M.L. Simpson, Magnetic Properties of Fe-Co Catalysts for Carbon Nanofiber Synthesis, American Physics Society National Meeting, Denver, Colorado (March 5-9, 2007).
20.
K.D. Sorge, O. Malkina, C. Finkel, K.
L. Klein, A. V. Melechko, J. D.
Fowlkes, P. D. Rack, and M. L. Simpson,
Magnetic Properies of Ni Nanoparticles Used for Carbon
Nanofiber Synthesis, American Physics Society National Meeting,
Denver, Colorado (March
5-9, 2007).
21.
K.L. Klein, A.V. Melechko,
J.D. Fowlkes, K.D. Sorge, T. Leventouri, R. Rucker, P.D. Rack and
M.L. Simpson, Evolution of Fe-Co Magnetic Alloys: from Thin Films to
Catalyst Nanoparticles for Carbon Nanofiber Synthesis.” Fall
Materials Research Society Meeting (November 26-December 1, 2006).
22.
*Combinatorial synthesis
and characterization of magnetic FexAl1-xN
thin films for biomedical applications, 53rd
International AVS Conference, San Francisco, CA (Nov. 13-17, 2006).
23.
*The fabrication and characterization of polycrystalline silicon
active layer thin film transistor with vertically aligned carbon
nanofiber, 53rd
International AVS Conference, San Francisco, CA (Nov. 13-17, 2006).
24.
*Digital Electrostatic
Electron-Beam Array Lithography (DEAL) Prototype Improvements,
53rd
International AVS Conference,
25.
*Electron-Beam Induced Etching (EBIE) for EUV Mask Repair,
53rd
International AVS Conference,
26.
*New
Strategies for Improvement and Implementation of the Digital
Electrostatic e-beam Array Lithography (DEAL) Concept, International
Vacuum Nanoelectronics Conference,
27.
*Elucidating
the growth mechanisms of electron beam induced deposition via a
Monte – Carlo based, 3D growth simulation,
50th International Conference on Electron, Ion, and
Photon Beam Technology and Nanofabrication,
28.
*Development of a bilayer nanolithography scheme utilizing
electron-beam-induced deposition of an ultrathin resist, 50th
International Conference on Electron, Ion, and Photon Beam
Technology and Nanofabrication, Baltimore, MD (May30-June 2, 2006).
29.
Design improvements and performance enhancement of the Digital
Electrostatic electron-beam Array Lithography (DEAL) Prototype, 50th
International Conference on Electron, Ion, and Photon Beam
Technology and Nanofabrication,
30.
*DC substrate bias effect on sputter deposited thin films and
characterization of thin film transistor fully deposited by rf
magnetron sputtering,
Spring
Materials Research Society Meeting, San Francisco CA (April 16-21,
2006).
31.
Fe-Co
magnetic alloy catalysts for the synthesis of vertically aligned
carbon nanofibers, Spring Materials Research Society Meeting,
32.
Fatigue-Reistance Enhancements by Glass-Forming Metallic Films, TMS
2006, 135th Annual Meeting & Exhibition,
33.
*Vertically Aligned Carbon Nanofiber
Array Integrated with Active-Addressed Thin Film Transistors for
Intra/Extracellular Stimulus and Measurement, 52nd
International AVS Conference,
34.
*Compositional and Structural
Characterization of Tungsten Nanostructures Produced by Electron
Beam-Induced Deposition, 52nd International AVS
Conference,
35.
Recent Lithography Results from the
Digital E-beam Array Lithography (DEAL) Concept, 52nd
International AVS Conference,
36.
*Electron Beam Induced Processing
Techniques for Advanced Lithography Mask Repair, 52nd
International AVS Conference,
37.
*Maskless, Direct-Write
Nanolithography using Electron Beam-Induced Deposition, 52nd
International AVS Conference, Boston, MA (Oct. 30-Nov. 4
2005).
38.
*Sputtering of Y3Al5O12:Cr Thin Films
for Temperature Sensor Applications, 52nd International
AVS Conference,
39.
*Electron Beam Induced Processing of
Nanoscale Features: Process Parameters, Simulated Growth, and
Nanoscale Applications, 52nd International AVS
Conference,
40.
Growth Mechanisms of Electron Beam Induced Carbon Deposition Using
Hydrocarbon Contamination,
Microscopy and Microanalysis 2005,
41.
Progress
Toward Realization of the Digital Electrostatic e-beam Array
Lithography (DEAL) Concept, International Vacuum Nanoelectronics
Conference,
42.
Magnetic Alloys in Nanoscale Biomaterials, Fourth International
Alloy Conference (IAC-4),
43.
*Fabrication and characterization of 20×20 active addressed
intra/extracellular stimulating and recording array using thin film
transistors and vertically-aligned carbon nanofibers,
49th
International Conference on Electron, Ion, and Photon Beam
Technology and Nanofabrication, Orlando, FL (June 1-4, 2005).
44.
*Unraveling the complex variable space of electron beam induced
deposition by a Monte – Carlo based, 3D growth simulation,
49th International Conference on Electron, Ion, and
Photon Beam Technology and Nanofabrication, Orlando, FL (June 1-4,
2005).
45.
Progress
Toward Full Implementation of the Digital Electrostatic E-beam Array
Lithography (DEAL) Concept,
49th
International Conference on Electron, Ion, and Photon Beam
Technology and Nanofabrication, Orlando, FL (June 1-4, 2005).
46.
Synthesis of Ultrasharp Vertically Aligned Copper-Silicon Nanocones
by Cu-Facilitated DC Plasma Reactive Ion Etching of Silicon
Substrate, 49th
International Conference on Electron, Ion, and Photon Beam
Technology and Nanofabrication, Orlando, FL (June 1-4, 2005).
47.
Effect
of Hydrogen on the Mechanical Properteis of Zirconium alloys,
NSF-Europe Grantees Meeting and Forum on Europe-USA Collaboration in
Materials Research, Strasbourg Germany (May 30 - 31, 2005).
48.
*Thin film synthesis of BMG alloys for coatings and combinatorial
alloy design, BMG-IV (The fourth International Bulk Metallic Glass
Conference), Gatlinburg, TN (May 2-5)
49.
Specimen-geometry
Effects
on Mechanical Behavior of
Metallic
Glasses, BMG-IV (The fourth
International Bulk Metallic Glass Conference),
50.
*Fabrication and characterization of active matrix array for cell
probing and screening, Spring Materials Research Society Meeting,
51.
*Electrical and microstructural characterization of molybenum
tungsten electrodes using a combinatorial thin film sputtering
technique, Spring Materials Research Society Meeting, San Francisco
CA (March 28-April 1, 2005)
52.
X-ray
and Neutron Diffraction Phase Mapping of Hydrogen-Charged
Zircaloy-4,
The
International Centre for Diffraction Data (ICDD) Spring Meeting,
53.
Synthesis of Ultrasharp Vertically Aligned Silicon Nanocones by
Catalytic Plasma Enhanced Chemical Vapor Deposition, Symposium KK:
Kinetics-Driven
Nanopatterning on Surfaces,
Fall Materials Research Society Conference,
54.
Recent Lithography Results from the
Digital E-Beam Array Lithography (DEAL) Concept, 51st
International American Vacuum Society Conference,
55.
*Optimization of RF Magnetron Sputter
Deposited Indium Tin Oxide (ITO) Transparent Conductors using a
Taguchi Statistical Method, 51st International American
Vacuum Society Conference, Anaheim CA (November 14-19, 2004).
56.
*Localized Heating Effects During Electron
Beam-Induced Deposition of Nanostructures, 51st
International American Vacuum Society Conference,
57. *Combinatorial Synthesis of Rare Earth-doped Yttrium Aluminum Garnet Thin Film Materials by using rf Reactive Magnetron Sputtering, 51st International American Vacuum Society Conference, Anaheim CA (November 14-19, 2004).
58.
*A Three - Dimensional Computer Simulation
of Electron - Beam Induced Deposition (EBID) 51st
International American Vacuum Society Conference,
59. Catalytic plasma enhanced chemical vapor deposition of ultrasharp vertically aligned silicon nanocones and their characterization, 51st International American Vacuum Society Conference, Anaheim CA (November 14-19, 2004).
*Cathodoluminescence Imaging and
Spectroscopy of Thin Films for
61.
Microscopy and Microanalysis 2004,
62.
Cathodoluminescence and Its Temperature Dependence of Tm-doped AlxGa1-xN
Thin Films, Nitride Workshop,
63.
Combinatorial Cu-Ni Catalyst for VACNF Growth: a comparative study
of Composition, Growth
Rate, Structure, Morphology, 48th International
Conference on Electron, Ion, and Photon Beam Technology and
Nanofabrication, San Diego, CA (June 1-4, 2004).
64.
*Combinatorial RF Magnetron Sputtering for Rapid Bulk Metallic Glass
Alloy Development, National TMS Meeting, Bulk Metallic Glass
Symposium,
65.
Enhanced
Blue Emission From Tm doped AlxGa1-xN Electroluminescent Thin Films,
Intneratinoal Semiconductor Device Research Symposium,
66.
Rapid
Chemical and Structural Analysis of Ternary Phase Diagrams with
Synchotron Radiation, National Materials Research Society Fall
Meeting,
67.
*Electron Interactions in Nanoscale Focused Electron Beam
Processing, 50th International American Vacuum Society
Conference,
68.
*Vacuum
Encapsulation of Micron-Sized Vacuum Field Effect Transistors, 50th
International American Vacuum Society Conference,
69.
*Gadolinium-doped Yttrium Aluminum Garnet Ultraviolet Emitting
Materials Deposited by rf Reactive Magnetron Sputtering, 50th
International American Vacuum Society Conference,
70.
*Gadolinium-doped Yttrium Oxide Thin Films Deposited by
Radio-frequency Magnetron Sputtering; Film Quality and
Cathodoluminescence Properties, 50th International
American Vacuum Society Conference, Baltimore MD (November 3-7,
2003).
71.
Digital
Electrostatic E-beam Array Lithography (DEAL):
Progress Toward Proof of Massively Parallel, Low-Energy
E-beam Lithography, Advanced Lithography Program Review Microsystems
Technology OfficeDefense Advanced Research Projects Agency,
72.
*Selective Nanoscale Electron Beam Stimulated Etching, National
Materials Research Society Spring Meeting, San
73.
*Gadolinium-doped Yttrium Oxide Ultraviolet Emitting Materials,
National Materials Research Society Spring Meeting, San Franscisco
CA (April 21-25 2003).
74.
*Pulsed
Laser Deposition of SrS:Te Thin Films, National Materials Research
Society Spring Meeting, San
75.
*Nanoscale
Electron Beam Stimulated Processing, Partnerships in Technology
(PIT) Forum,
76. *Soft electron beam etching for fine TEM sample preparation, 28th Annual SPIE Microlithography Symposium, San Jose CA (February 23-28, 2003).
77. *Nanoscale Electron Beam Stimulated Processing, Processing at the Nanoscale Session, 49th International American Vacuum Society Conference, Denver CO (November 4-8, 2002).
78. Ultraviolet Emitting SrS:Te Thin Films, Thin Films Session, 49th International American Vacuum Society Conference, Denver CO (November 4-8, 2002).
79.
*Nanoscale Electron Beam Stimulated
Processing, XI International Materials Research Congress, Cancun
80.
Ultraviolet Emitting SrS:Te Thin Films, XI
International Materials Research Congress, Cancun
81. *Multi-layer Chromium-based Optical Coatings for 157nm Lithography, 48th International Symposium of the American Vacuum Society (November 2001).
82. *Thin Film Growth of Reactive Sputter Deposited Tungsten-Carbon Thin Films, 48th International Symposium of the American Vacuum Society (November 2001).
83. Composite Tantalum Nitride-Silicon Nitride Thin Films for 193nm Embedded Attenuated Phase Shift Masks, 48th International Symposium of the American Vacuum Society (November 2001).
84.
Gray Bar
Masking: Fabrication and Imaging for 193nm, Proceedings of the SPIE
21st Annual Symposium on Photomask Technology, (October
2001).
85. *Materials Development and Current Transport in Vacuum Microelectronic Devices, 14th Biennial University/Government/Industry Microelectronics Conference (June 2001).
86.
*
87. *Luminescence and Energy Transfer Mechanisms in Mn+2, Cr+3, and Eu+3 Doped ZnGa2O4, 6th International Conference on the Science and Technology of Display Phosphors, (Nov. 2000).
88.
*Field
Emitter Material Investigations for Vacuum Field Effect Transistors,
24th Annual
89. *Eu+3 and Cr+3 Doping for Red Cathodoluminescence in ZnGa2O4, 47th International American Vacuum Society Conference (Oct. 2000)
90.
Laser
Based Processing of Next Generation Materials,
91.
Field
Emitter Material Investigations for Vacuum Field Effect Transistors,
International Vacuum Electronics Conference (May 2000).
92.
*Deposition of Ceramic Materials Using Powder and Precursor Vehicles
Via Direct Write Processing, National Materials Research Society
Spring Meeting (April 2000).
93.
Epitaxial Thin Film Phosphors for Low Voltage FED Applications,
National Materials Research Society Spring Meeting (April 2000).
94.
*Semiempirical
Self Consistent Filed Modeling of the Ce+3 4f and 5d Energy Levels
in Solid State Luminescent Materials, National Materials Research
Society Fall Meeting (Nov. 1999).
95.
Laser
Direct Writing of High-Resolution Phosphor Screens, National
Materials Research Society Fall Meeting (Nov. 1999).
96.
Enhanced
Luminescence in Epitaxial Oxide Thin Film Phosphors, Fifth
International Conference on the Science and Technology of Display
Phosphors, (Nov. 1999).
97.
The
Effect of Carbon Deposit on Electron Beam Degradation of Oxide Thin
Film Phosphors, 1999 National American Vacuum Society (Oct. 1999).
98.
Materials for 157nm Lithography, Bay Area Chrome Users Society
Meeting (Sept. 1999).
99.
*AVT-RIT-NSF Partnership for the Development of Low Voltage Thin
Film Phosphors for Field Emission Display Devices, University
Government Industry Microelectronics Conference (June 1999).
100.
Exploring Silicon Process Technology Through RIT’s NPN BJT Process,
University Government Industry Microelectronics Conference (June
1999).
101.
*Sputtering Luminescent Ta2Zn3O8
Thin Films, National Materials Research Society Spring Meeting
(April 1999).
102.
Laser
Induced Forward Transfer of Luminescent Particulate Materials,
National Materials Research Society Spring Meeting (April 1999).
103.
Electron
Beam Degradation of Oxide and Sulfide Thin Film Phosphors for Field
Emmision Displays,
104.
*Thin
Film Characterization and Performance of Sputter Deposited SrxCa1-xGa2S4
Electroluminescent Phosphors, Rochester Institute of Technology
Microelectronic Engineering Seminar (Mar. 1998).
105.
*Rare
Earth and Transition Metal Doping of the Ta2Zn3O8
Phosphor for Low Voltage FED Applications, 3rd
International Conference on the Science and Technology of Display
Phosphors (Nov 1997).
106.
*Crystal
Field and Semiemperical Molecular Orbital Calculations on Ce+3
Doped Alkaline Earth Sulfide Phosphors, 3rd International
Conference on the Science and Technology of Display Phosphors (Nov.
1997).
107.
*Thin
Film Electroluminescent Displays, Rochester Institute of Technology
Microelectronic Engineering Seminar (Nov. 1997).
108.
*XPS
Analysis and SCF/CI modeling of Ce+3 Core Level and
Valence Level Electrons in
CaxSr1-xGa2S4,
1997 National American Vacuum Society (Oct. 1997).
109.
*Microencapsulated Pixels for an Integrated Phosphor Field Emission
Device, Upstate
110.
*Photoluminescence and Thermal Quenching of Bound Excitons in (BaS)1-x(SrTe)x,
Eighth International Conference on II-VI Compounds (July 1997).
111.
*Thin
Film Electroluminescent Displays: Device Structure, Materials
Properties, Device Physics and Phosphor Development, Sandia National
Laboratories (Apr. 1997).
112.
Excitonic Emission from BaS:Te Phosphor Powders,
113.
*Semiempirical
Calculation of 4f-5d Spectroscopy of Ce+3 in Metal Sulfide Host
114.
*Blue
Excitonic Emission from SrS:Te Phosphor Powders, Second
International Conference of the Science and Technology of Display
Phosphors (Nov. 1996).
115.
Luminescence, Absorption, and Site Symmetry of Ce Activeated SrGa2S4
Phosphors, Second International Conference of the Science and
Technology of Display Phosphors (Nov. 1996).
116.
*Effects
of Annealing and Stress on the SrS:Ce Thin Film Electroluminescent
Phosphor, 1996 National American Vacuum Society Meeting (Oct. 1996).
117.
XPS
Measurement of ZnS Valence Bands, 1996 National American Vacuum
Society Meeting (Oct. 1996).
118.
*Microstructural
Changes and Their Effects on the Emission Spectra in SrS:Ce Thin
Film Electroluminescent Devices,
8th International Conference on
Electroluminescence(July 1996).
119.
XPS
Valence Band and Fermi Level Analysis of ZnS, SrS, and CaxSr1-xGa2S4
Electroluminescent Phosphors, 1996 Florida Chapter American Vacuum
Society (Feb. 1996).
120.
*Negative Ion Re-sputtering Effects of rf Magnetron Sputter
Deposited CaxSr1-xGa2S4
Thin Film Electroluminescent (TFEL) Phosphors, 1996 National
Materials Research Society Meeting (Apr. 1996).
121.
*Variations in the Ce Radiative Transition by Oxygen Doping in the
Ca0.55Sr0.45Ga2S4:Ce
Blue Electroluminescent Phosphor, First International Conference on
the Science and Technology of Display Phosphors (Nov. 1995).
122.
*XPS
Analysis of SrS:Ce and SrxCa1-xGa2S4:Ce
Blue Thin Film Electroluminescent
(TFEL) Phosphors, 1995 National American Vacuum Society
Meeting (Oct. 1995).
123.
*Microstructural
Evolution of Sputter Deposited SrxCa1-xGa2S4:Ce
Electroluminescent Thin Film Blue Phosphor, National Materials
Research Society Spring Meeting (Apr. 1995).
124.
*Brighter Blue SrxCa1-xGa2S4:Ce
Electroluminescent Devices with an Electron Injection Layer, 1995
National Society for Information Display (May 1995).
125.
*Enhanced Electron Injection In Blue Electroluminescent Devices,
1995
1.
Title:
“Digital Electrostatic e-beam Array Lithography” (DEAL)
Sponsor:
Defense Advanced Research Project Agency (DARPA), Subcontract
through UT/Battelle
Total
Award:
$3.2 million (PDR share -- $343,178)
PI and
all co-Pi’s:
(ORNL) D. H. Lowndes (PI), L.R. Baylor, M. L. Simpson, M. A.
Guillorn, V. I. Merkulov, J.H. Whealton, C. L. Britton, and D. P.
Hutchinson, (UTK) P. D. Rack, D. C. Joy, S. K. Islam, and B.
Blalock
Dates of
Contract:
5/02-/8/04
* PDR
was one of the original authors of the proposal submitted to DARPA.
The contract was run through ORNL and subcontracted to UTK.
PDR was the PI of task #5 – “Fine Line Direct Write/Etch
Using Electron Beams,” and co-PI on task #6 – “Encapsulation for
nano-triode vacuum transistor”
2.
Title: “Nanoscale
Exploratory Research: Nanoscale Electron Beam Stimulated Processing”
Sponsor:
National Science Foundation
Total
Award:
$99,688 (PDR share -- $85,123)
PI and
all co-Pi’s:
Philip D. Rack (PI), David C. Joy (UTK), Phillip E. Russell
(NC State)
Dates of
Contract:
7/02-12/003
3.
Title: “SBIR
Phase I: Thin Film Adhesion Metrology Based on Electrostatically
Applied Forces”
Sponsor:
National Science Foundation, subcontract through Fast Forward
Devices Inc. (FFD)
Total
Award:
$100,000 (PDR share -- $16,127)
PI and
all co-Pi’s:
Barry Lucas (PI) (FFD), Jack Hay (FFD), Philip D. Rack
(co-PI),
Dates of
Contract:
6/02-12/02
* PDR
was one of the original authors of the proposal submitted to NSF.
The contract was run through Fast Forward Devices and
subcontracted to UTK.
4.
Title: “UV
Electroluminescent Device Development”
Sponsor:
UT/Battelle (seed money proposal)
Total
Award:
$60,000 (PDR share -- $30,000)
PI and
all co-Pi’s:
Steve Allison (PI) (ORNL), Philip D. Rack (PI), Al Ackerman
(co-PI) (ORNL)
Dates of
Contract:
8/02-12/03
* PDR
was one of the original authors of the proposal submitted to ORNL.
The contract was run through ORNL and subcontracted to UTK.
5.
Title:
“Enabling Technologies for Autonomous, MEMs-Based, Environmental
Sensors”
Sponsor:
Prime – Department of Energy (DOE), subcontract from Rochester
Institute of Technology (RIT)
Total
Award:
PDR share -- $20,106
PI and
all co-Pi’s:
Philip D. Rack (PI)
Dates of
Contract:
9/02-9/03
*PDR was
not a co-author of the original proposal.
DOE awarded the contract to RIT and a subcontract was
subsequently arranged between UTK and RIT
6.
Title: “Powe
Junior Faculty Achievement Award: Ultraviolet Emitting
Sponsor:
Total
Award:
$5,000
PI and
all co-Pi’s:
Philip D. Rack (PI)
Dates of
Contract:
7/03
7.
Title:
“Combinatorial Sputter Deposition of Metallic Alloys”
Sponsor:
Department of Energy (DOE)
Total
Award:
PDR share $15,700
PI and
all co-Pi’s:
George Pharr (PI) (UT/ORNL), Easo George (PI) (UT/ORNL), Philip
D. Rack (co-PI)
Dates of
Contract:
4/03-4/04
*PDR was
not a co-author of the original proposal.
DOE awarded the original contract to GP and EG.
PDR contributed to the program and received $15,700 to
purchase equipment and materials.
8.
Title: “Regrowth
of Superconducting Precursor Materials”
Sponsor:
Department of Energy (DOE), subcontract from UT/Battelle
Total
Award:
PDR share $190,042 (8/03 $43,623, renewed 8/04 $43,634, renewed 8/05
$49,212, renewed 8/06 $53,573)
PI and
all co-Pi’s:
Philip D. Rack (PI)
Dates of
Contract:
8/03-8/06
*PDR was
not a co-author of the original proposal.
DOE awarded the original contract to David Christen and PDR
is contributing to their materials development and was awarded a
subcontract to participate.
9.
Title: “Optical
Addressing of Individually-Addressable, Nanoscale Electrochemical
Probing Arrays”
Sponsor:
National Institute of Health (NIH), subcontract from UT/Battelle
Total
Award:
PDR share $40,565
PI and
all co-Pi’s:
Timothy Mcknight (PI) (ORNL), Philip D. Rack (co-PI)
Dates of
Contract:
11/03-11/04
*PDR was
the author of a supplemental grant to an existing NIH program at
ORNL. The supplement
was funded by NIH and is subcontracted to UTK via UT/Battelle
through the original grant.
10.
Title:
“Molecular-Scale Engineering and Nanoscale Technologies (MENT)”
Sponsor:
UT/Battelle
Total
Award:
$496,210 (PDR share $248,105)
PI and
all co-Pi’s:
Michael L. Simpson (co-PI) (ORNL/UTK), Philip D. Rack
(co-PI), David C. Joy (co-PI) (UTK/ORNL)
Dates of
Contract:
10/03-1/05
* This
is a joint program between PDR’s group and the Molecular-Scale
Engineering and Nanoscale Technologies (MENT) group at ORNL.
11.
Title: “DEAL:
From Proof of Lithography to Full Implementation at the 50nm Level
-- A Research Proposal”
Sponsor:
Defense Advanced Research Project Agency (DARPA), Subcontract
through UT/Battelle
Total
Award:
$3.9 million, (PDR subcontract – $534,843)
PI and
all co-Pi’s:
(ORNL) L.R. Baylor (PI),
D. H. Lowndes, M. L. Simpson, W. L. Gardner, R.J. Kasica, A.
Melechko, (UTK) P. D. Rack, D. C. Joy, S. K. Islam, and B.
Blalock
Dates of Contract:
7/04-7/06
* PDR
was one of the original authors of the proposal submitted to DARPA.
The contract was run through ORNL and subcontracted to UTK.
PDR was a co-PI on task#1 – “Vertically Aligned Carbon
Nanofiber Development,” co-PI on task #4 – “Lithography Full
Implementation,” and the PI of task #5 – “Nanoscale Electron Beam
Stimulated Direct-Write”
12.
Title: “Thin
film coatings for phosphor temperature sensors”
Sponsor:
UT/Battelle
Total
Award:
$5,850
PI and
all co-Pi’s:
Philip D. Rack
Dates of Contract:
7/04-7/06
*PDR
performed a subcontract to ORNL PI Steve Allison to deposit thin
film temperature sensor materials.
13.
Title:
“Molecular-Scale Engineering and Nanoscale Technologies (MENT)”
Sponsor:
UT/Battelle
Total
Award:
$496,399 (PDR approximate share -- $248,199)
PI and
all co-Pi’s:
Michael L. Simpson (PI), Philip D. Rack (co-PI), David C. Joy
(co-PI)
Dates of
Contract:
1/05-1/06
* This
is a joint program between PDR’s group and the Molecular-Scale
Engineering and Nanoscale Technologies (MENT) group at ORNL.
14.
Title: “The
Physical Principles and the Practical Optimization of Direct
Deposition E-beam Systems for the Editing and Repair of Lithographic
Masks”
Sponsor:
Semiconductor Research Coorporation (SRC) and Intel Corp.
Total
Award:
$204,729 (PDR share -- $102,364)
PI and
all co-Pi’s:
David C. Joy (PI), Philip D. Rack (co-PI)
Dates of
Contract:
1/05-12/07
*This was a joint new proposal written by DCJ and PDR
15.
Title: “Active
Matrix Transistor Integration for Addressing Nanofiber Biological
Probes”
Sponsor:
Primary sponsor National Institute of Health (NIH), subcontract
through UT/Battelle
Total
Award:
$54,441
PI and
all co-Pi’s:
Philip D. Rack (PI)
Dates of
Contract:
11/04-11/06
*This is a renewal of a supplemental grant PDR wrote to an existing NIH program at ORNL. The supplement written by PDR and was funded by NIH and is subcontracted to UTK via UT/Battelle through the original grant
16.
Title: “Mask
Repair and Circuit Editing Using Focused Electron Beams”
Sponsor:
Intel Corporation
Total
Award:
~$172,152 (PDR share $86,077)
PI and
all co-Pi’s:
David C. Joy (PI) (UT), Philip D. Rack (co-PI)
Dates of
Contract:
1/05-12/06
*This
was a joint new proposal written by DCJ and PDR
17.
“Nanofabrication of DEAL Emitter Arrays”
Sponsor:
Defense Advanced Research Project Agency (DARPA), Subcontract
through UT/Battelle
Total
Award:
$3.9 million, (PDR new subcontract $257,630 )
PI and
all co-Pi’s:
(ORNL) L.R. Baylor (PI),
D. H. Lowndes, M. L. Simpson, W. L. Gardner, R.J. Kasica, A.
Melechko, (UTK) P. D. Rack, D. C. Joy, S. K. Islam, and B.
Blalock
Dates of Contract:
6/05-9/07
* PDR
was one of the original authors of the proposal submitted to DARPA.
The contract was run through ORNL and subcontracted to UTK.
This subcontract represents additional funding to PDR group
to facilitate nanofabrication task on the proposal in additional to
existing subcontract funding of $534,843.
18.
Title:
“Molecular-Scale Engineering and Nanoscale Technologies (MENT)”
Sponsor:
UT/Battelle
Total
Award:
$496,754 (PDR approximate share -- $248,377)
PI and
all co-Pi’s:
Michael L. Simpson (PI), Philip D. Rack (co-PI), David C. Joy
(co-PI)
Dates of
Contract:
1/06-1/07
* This is a joint program between PDR’s group and the Molecular-Scale Engineering and Nanoscale Technologies (MENT) group at ORNL.
19.
Title:
“Nanostructured Sensor Instruments for Astrobiological Exploration”
Sponsor:
National Aeronautics and Space Administration (NASA)
Total
Award:
$864,647 (PDR approximate share -- $50,000)
PI and
all co-Pi’s:
Syed Islam (PI) (UT), Ida Lee (UT), Tim Mcknight (ORNL), Philip
D. Rack (co-PI)
Dates of
Contract:
1/06-12/08
* This
is a joint new proposal written by SI, IL, TM, and PDR.
20.
Title:
“Center for Nanophase Materials Science (CNMS)”
Sponsor:
UT/Battelle
Total
Award:
$379,634 (PDR approximate share -- $200,000)
PI and
all co-Pi’s:
Philip D. Rack (PI), Michael L. Simpson (co-PI)
Dates of
Contract:
11/05-11/06
* This is new program between PDR and the new Center for Nanophase Materials Science. As part of this program, PDR will have a 50% buyout this year to help direct the Nanofabrication Research Laboratory at CNMS.
21.
Title: “Enabling
low-temperature synthesis of vertically aligned carbon-nanotubes by
selective heating of catalyst”
Sponsor:
National Science Foundation, subcontract through
CFDRC
Total
Award:
$100,000 (PDR share -- $33,000)
PI and
all co-Pi’s:
Alex Vasenkov (PI) (CFDRC), Philip D. Rack (co-PI), Anatoli
Melechko (UT)
Dates of
Contract:
7/06-7/07
* PDR
was one of the original authors of the proposal submitted to NSF.
The contract was run through CFDRC and subcontracted to UTK.
22.
Title:
“Molecular-Scale Engineering and Nanoscale Technologies (MENT)”
Sponsor:
UT/Battelle
Total
Award:
$485,580
(PDR approximate share -- $245,000)
PI and
all co-Pi’s:
Michael L. Simpson (PI), Philip D. Rack (co-PI),
Dates of
Contract:
10/06-10/07
* This is a joint program between PDR’s group and the Molecular-Scale Engineering and Nanoscale Technologies (MENT) group at ORNL.
23.
Title: “
Sponsor:
UT/Battelle
Total Award:
$110,000
PI and
all co-Pi’s:
Philip D. Rack
Dates of
Contract:
1/06-8/07
* This program is a joint faculty appointment (PDR 50%) in the Center for Nanophase Materials Sciences at Oak Ridge National Laboratories. PDR has responsibilities in the Nanofabrication Research Laboratory and the Bio-inspired Nanoscale Systems group.
24.
Title: “Joint
Directed Research Development Proposal:
Nanofabricated Scanning Probe Microscopy Tips for Enhanced
Detection of Molecular Photo Electrochemical Processes”
Sponsor:
Science
Total
Award:
$37,804
PI and
all co-Pi’s:
Philip D. Rack
Dates of
Contract:
1/07-12/31/07
* PDR is
the single PI.
Source:
Intel
Total Award:
$36,353
PI and
all co-Pi’s:
Philip D. Rack
Dates of
Contract:
January 10, 2007 – unrestricted
*PDR is the
single PI and this is an unrestricted grant from Intel to support
PDR’s research in EBIP.
26.
Project Title: “Collaborative
Research: Electrofluidic Carbon Nanofiber Arrays for
Multi-Dimensional Separations”
Source:
NSF
Total Award:
Total award $210,000, PDR
share $98,578
Dates
fo Contract:
July 1, 2007 – June 30, 2010
PI and
all co-Pi’s:
Jason C. Heikenfeld (
27. Title: “STTR:
Selective Carbon Nanotube Etching”
Source:
NSF
Total
Award:
PDR share $ 40,334
PI and all
co-Pi’s: Vladimir
Mancevski (Xidex Corporation) and Philip D. Rack
Dates of Contract: June 1, 2007 - May 30, 2008
*PDR
was a co-Pi on the original grant
28.
Title: “
Sponsor:
UT/Battelle
Total Award:
$59,075
PI and
all co-Pi’s:
Philip D. Rack
Dates of
Contract:
8/07-7/08
* This program is a joint faculty appointment (PDR 50%) in the Center for Nanophase Materials Sciences at Oak Ridge National Laboratories. PDR has responsibilities in the Nanofabrication Research Laboratory and the Bio-inspired Nanoscale Systems group.
29.
Title:
“Molecular-Scale Engineering and Nanoscale Technologies (MENT)”
Sponsor:
UT/Battelle
Total
Award:
$295,746
(PDR approximate share -- $150,000)
PI and
all co-Pi’s:
Michael L. Simpson (PI), Philip D. Rack (co-PI),
Dates of
Contract:
10/07-10/08
* This is a continuing joint program between PDR’s group and the Molecular-Scale Engineering and Nanoscale Technologies (MENT) group at ORNL.
30.
Title:
“Center for Nanophase Materials Science (CNMS)”
Sponsor:
UT/Battelle
Total
Award:
$379,634 (PDR approximate share -- $200,000)
PI and
all co-Pi’s:
Philip D. Rack (PI), Michael L. Simpson (co-PI)
Dates of
Contract:
11/07-11/08
* This is continuing between PDR and the new Center for Nanophase Materials Science.
31.
Project Title: “Advanced
Ion Microscopy for Metrology, Review and Lithography”
Source:
Semiconductor Research Corporation
Project
Location: UT
Total Award
Amount: $226,428 (PDR
share -- $113,214)
Starting:
January 1, 2008
Ending:
December 31, 2011
Calendar
Months:
Summer Months:
Person Months
per year: 0
PI and
all co-Pi’s: David C. Joy (PI) and Philip D. Rack (co-PI)
32.
Title: “Joint
Directed Research Development Proposal:
Nanofabricated Scanning Probe Microscopy Tips for Enhanced
Detection of Molecular Photo Electrochemical Processes”
Sponsor:
Science
Total
Award:
$29,700
PI and
all co-Pi’s:
Philip D. Rack
Dates of
Contract:
1/08-12/31/08
extension to current JDRD program.
33.
Title:
Phase I-B “STTR: Selective
Carbon Nanotube Etching”
Source:
NSF
Total
Award:
PDR share $ 15,000
PI and all
co-Pi’s: Vladimir
Mancevski (Xidex Corporation) and Philip D. Rack
Dates of Contract: June 1, 2008 – December 31, 2008
*PDR
was a co-Pi on the original grant
34.
Title:
“SBIR: Sputter Deposition of
Photonic
Source:
Ballistic Missile Defense Agency
Total
Award:
PDR share $17,000
PI and all
co-Pi’s: Milan Buncick
(Aegis Corporation) and Philip D. Rack
Dates of Contract: June 1, 2008 – December 31, 2008
*PDR
was a subcontractor on the original grant
35.
Project Title: “Laser
Enhanced Nanoscale Focused Electron Beam Induced Processing”
Sponsor: ORNL
Seed Money Program
Total Award:
$150,000 (PDR prorated share ~ 75k, co-PI with Jason Fowlkes ORNL)
Starting: July 1, 2008
Ending:
June 30, 2009
Current
PI and
all co-Pi’s: Jason D. Fowlkes (PI) and Philip D. Rack (co-PI)
*Funded at ORNL
and is part of PDR’s joint appointment responsibilities
36.
Project Title: “Electromechanical
Imaging of Live Vascular Smooth Muscle Cells”
Sponsor: NIH
Total Award:
$500,000 (PDR share $ ~ 206,400)
Starting: February 1,
2009
Ending:
January 31, 2012
Current
Calendar
Months: 0
Summer Months:
0
Person
Months per year: 0
PI and
all co-Pi’s: Alexey Vertgel(PI -- Clemson University),
Sergei Kalinin (co-PI UT/ORNL)
Philip D. Rack (co-PI)
37.
Project Title:
“SBIR Phase I:
Photon Enhanced SEM Platform for Nano-Manufacturing”
Sponsor: NSF
primary, subcontract through Omniprobe
Total Award:
PDR share $ 32,977
Starting: January 1,
2009
Ending:
July 31, 2009
Current
Calendar
Months: 0
Summer Months:
0
Person Months
per year: 0
PI and
all co-Pi’s: Tom Moore (PI -- Omniprobe), Philip D. Rack (co-PI)
38.
Title:
“SBIR: Sputter Deposition of
Photonic
Sponsor:
Ballistic Missile Defense Agency
Total
Award: PDR share $96,000 (750,000 total)
PI and all
co-Pi’s: Milan Buncick (PI -- Aegis Corporation) and Philip D.
Rack (co-PI)
Dates of Contract: January 1, 2009 – December 31, 2010
*PDR
was a co-Pi on the original grant
Calendar
Months: 0
Summer Months:
0
Person Months
per year: 0
39.
Project Title: “Conductive
Carbon Nanotube AFM Tips for Dopant Profiling: Phase II”
Sponsor:
Sematech-primary, subcontract through Xidex Corporation
Total Award:
PDR share $ 15,000
Starting: September 1, 2009
Ending:
August 31, 2010
Current
Calendar
Months: 0
Summer Months:
0
Person Months
per year: 0
PI and
all co-Pi’s: Vladimir Mancevski (PI) Philip D. Rack (co-PI)
40.
Project Title: “Temperature Dependent Focused Electron Beam
Induced Processing for Parameter Extraction”
Sponsor: FEI
corporation
Total Award:
$40,000
Starting: April 1, 2009
Ending:
March 31, 2010
Current
Calendar
Months: 0
PI and
all co-Pi’s: Philip D. Rack (PI)
41.
Project Title: “Enhanced Visible Light Absorption in Thin
Film Multicrystalline Si Incorporated with Nanocrystals”
Sponsor:
Sustainable Energy and Education Research Center (SEERC)
Total Award:
$40,000 (PDR share 13,333)
Starting: May 1, 2009
Ending:
April 30, 2010
Current
Calendar
Months: 0
PI and
all co-Pi’s: Ramki Kalyanaraman (PI), Gerd Duscher (co-PI), Philip
D. Rack (co-PI)
42.
Project Title: “Design
and Synthesis of Nanomaterials”
Sponsor: DOE
Basic Energy Sciences
Total Award:
$1,480,000 (PDR share ~300,000)
Starting: April 1, 2009
Ending:
March 31, 2012
Current
Calendar
Months: 0
*PDR is the
leading PI and this program is funded through ORNL (as part of PDR’s
joint appointment responsibilities)
43.
Project Title: “Conductive
Carbon Nanotube AFM Tips for Dopant Profiling: Phase II”
Sponsor:
Sematech
Total Award:
$100,000 (co-PI with Vladimir Mancevski Xidex Corp., PDR share $15k)
Starting: Sept 19, 2009
Ending:
June 15, 2010
Pending
Calendar
Months: 0
44.
Project Title: “NSF SBIR: Shielded Conductive CNT probes”
Sponsor: NSF
Total Award:
$100,000 (co-PI with Xidex Corp., PDR share $30,868)
Starting: January 1,
2010
Ending:
June 31, 2010
Pending
Calendar
Months: 0.5
45.
Title:
“Molecular-Scale Engineering and Nanoscale Technologies
(MENT)”
Sponsor:
UT/Battelle
Total Award:
$489,785
(PDR approximate share -- $250,000)
PI and all
co-Pi’s: Michael L.
Simpson (PI), Philip D. Rack (co-PI),
Dates of
Contract:
10/09-10/11
* This is
a continuing joint program between PDR’s group and the
Molecular-Scale Engineering and Nanoscale Technologies (MENT) group
at ORNL.
Pending
1.
Project Title: “Development of a Thin-film Boron Phosphide
Solid-state Neutron Detector”
Sponsor: NNSA
Total Award:
$1,622,180 (UT and Y-12, PDR share ~300k)
Starting: January 1,
2010
Ending:
December 31, 2012
Pending
Calendar
Months: 1.25
1.
NSF
Career “Growth and Characterization of Rare Earth and Transition
Metal III-V Nitrides for Visible Light Emitting Materials”
(2001)
2.
ONR
Young Investigator “Selective Nanoscopic Electron Beam Stimulated
Processing for Nanoscale Functionalization and Device Prototyping”
(2001)
3.
Applied Materials “Fast Scintillator
Materials Development for a High-Speed Scanning Electron Microscope”
(2001)
4.
NSF –
Nanoscale Interdisciplinary Research Team “Nanoscale Synthesis for
Biomolecular Probes and Cellular Mimics” (2001)
5.
NSF –
Nanoscale Interdisciplinary Research Team “Ion Beam Implanted
Nanoclusters”
6.
ATP with
Fast Forward Devices – “Thin Film Adhesion Metrology Based on
Electrostatically Applied Forces” (2001)
7.
ERDA
with
8.
Petroleum Research Fund “Electron Stimulated Reactions with Gas
Phase and Physisorbed Molecular Species” (2002)
9.
NSF –
“NIRT: Electronic Charge in Complex Nanostructures and Its
Application in Nanodevices” (2002)
10.
NSF –DMR
“Controlled Synthesis and Characterization of Tellurium Doped
Alkaline Earth Sulfide Thin Films for Solid State UV Emission”
(2002)
11.
KLA-Tencor – “Modeling Electron-Gas and Electron-Solid Interactions”
(2002)
12.
Semiconductor Research Coorporation and DARPA “Selective Nanoscale
Electron Beam Processing” (2002)
13.
Semiconductor Research Corporatoin (SRC) “Electron Beam Induced
Directed Assembly of Intracellular Biological Probes” (2003).
14.
UT/ONRL
Summer Research Internship Program “Synthesis and Characterization
of Ultraviolet Emitting Materials and Devices” (2003)
15.
NSF
“CAREER: Fundamental Investigations of a Site Selective Focused
Electron Beam Nanomanufacturing Process” (2003).
16.
NSF “NIRT:Electron
Transport in Nano-Scale Hetero-junctions” (2003)
17.
NSF
“Development of Tellurium Doped Alkaline Earth Sulfide Thin Films
for Solid State UV Emission” (2003)
18.
NSF
“Fundamental Investigations of a Site Selective Focused Electron
Beam Nanomanufacturing Process” (2004)
19.
NSF
“Investigations of Bound Exciton Recombination in Tellurium Doped
Alkaline Earth Sulfide Materials for
20.
DOD-DEPSCOR – “Development
of Mobility Modulation Transistor Using Conducting Oxides” (white
paper) (2004)
21.
DOE-ONRL “Nano-Spectrometer:
A Novel Sensitive, Cheap, Miniature Sensor For Ecosystem
Characterization” (2004)
22.
DOE “Employing Crystal Structure Systematics for Discovery of New
Materials for hydrogen Storage Applications” (2005)
23.
EPA
“Nanostructured Sensor Instruments for Pollutant and Microbial
Detection
24.
NSF
“NIRT: Synthetic Nanostructures for Probing, Modifying, and
Controlling Live Cell Functions” (2005)
25.
NSF
“Fundamental Investigations of a Site Selective Focused Electron
Beam Nanomanufacturing Process” (2005)
26.
DOE-EPSCOR “Tennessee Consortium of Nano-structured Materials for
Efficient Power Applications” (2005)
27.
NIH SBIR
“Nanofabricated Phantom for In Vitro Dynamic Image Analysis using
PET” (2005)
28.
NSF SBIR
“Enabling
low temperature, plasma enhanced chemical vapor deposition of
vertically aligned carbon-nanotubes by selective heating of
catalyst” (2005).
29.
NIH
“Nanoscale tools for genomic profiling of
intact cells” (2005).
30.
Army
Research Laboratory “Advanced metals and ceramics research.
Thematic research thrust #1 ─
Collaborative Research on Dynamic Behavior of Bulk Metallic
Glass Matrix Composites and Nano-Structured Tantalum Alloys” (2005)
31.
NSF
“NER:
Nanostructured Electrofluidic Device Platform for Biomimetic
Membrane Transport” (2005).
32.
NSF “NIRT:
Acitve Synthetic Nanostructures for Probing, Modifying, and
Controlling Live Cell Functions”
33.
NSF “NUE:
Interdisciplinary Education for UT Undergraduates in Nano-Bioscience
and Technology”
34.
NSF “Nanostructured
Sensor Instruments for Pollutant and Microbial Detection” (2007)
35.
NSF
“Collaborative Research: Nanoelectromechanics of Biomolecular
Systems”
(2007)
36.
DOD “SBIR
Phase I proposal—High Throughput Experimentation Physical Vapor
deposition (PVD) Chamber for Accelerated Microelectronics Materials
Research and Development” (2007).
37.
FEI Inc.
“Electron Beam Induced Processing” 2007 (whitepaper).
38.
SRC
“Advanced e-beam
Systems for Nanoscale Materials Processing, Nanopatterning, and
Defect Repair” (2008)
39.
NSF
“Collaborative Research:
Instrumentation For Electromechanical Imaging Of Live
Electrophysiologically Active Cells”
2008
40.
NSF
“MRSEC:
The Tennessee/Louisiana Flagship Materials Laboratory (FML)”
2008
41.
DOE “Title:
“Advanced Dual Focused Electron/Ion Beam Nanoscale
Dircected Assembly System”
2008.
42.
DARPA “Title:
“Tip
Based Nanofabrication” 2008
43.
NASA “Lab-in-a-Teacup
Sensor Instruments Incorporating Nanostructured
Devices for Astrobiology
Exploration” 2008
44.
NSF “NUE:
Synthesis and Characterization of Nanoscale Devices and Systems”
2008
45.
Xidex
Corporation (NSF primary) “SBIR Phase II: Selective Carbon Nanotube
Etching” 2009
46.
Xidex
Corporation (DOE primary) “SBIR Phase I:
Electrically Shielded Carbon
Nanotube Probes” 2009
47.
DARPA “Super Agile Lab-on-Chip Electrofluidic Platform” seed funding
whitepaper proposal.
2009
Graduated
Steven
Randolph
(Masters – December 2004): “Nanoscale
Materials Processing: Electron Beam-Stimulated Etching of Silicon
and Silicon Dioxide”
(now with FEI Corporation)
Yuepeng
Deng
(Ph.D. – May 2005): “Thin
Film Sputtering of Gadolinium and Chromium-doped Yttrium Aluminum
Garnet”
(now with Vitek Corporation)
Steven
Randolph
(Ph.D. – December 2005): “Experimental,
Theoretical, and Device Application Development of Nanoscale Focused
Electron-Beam-Induced Deposition”
(now with FEI Corporation)
Seung-Ik Jun
(Ph.D. – May 2006) “Active Matrix Thin Film Transistor
Integration for a Novel Intra-cellular Biological Probe” (now with
Dpix Corporation)
Yifei
Zhang
(Ph.D – December 2006) “Regrowth of Superconducting Precursor
Materials on Bi-axially Textured Nickel Wires”
(now with Oak Ridge
National Laboratories)
Ryan
Rucker
(Masters – December 2006) “Characterization
of Processes used in Nanofabrication of Digital Electrostatic E-Beam
Array Lithography (DEAL) Devices”
(Now with IM Flash Technologies)
Daryl Smith
(Ph.D. – May 2007) “Elucidating
the Growth Mechanisms of Electron Beam Induced Deposition via a
Three Dimensional, Monte-Carlo Based Simulation”(now
with DAS Freelance)
Matthew Lassiter
(Ph.D. – August 2009) “Electron
Beam Induced Etching” (post
doc UT/ORNL)
Current
Students (start date)
Degree
Status
Expected Graduation
Jon Peak
(5/06)
PhD
passed qual. exams
Dissertation subject – Thin Film Synthesis of Advanced Scintillator
Materials
Seyeoul
Kwon
(12/06)
PhD
passed qualifying exams
Dissertation Subject – Materials development and Device Fabrication
of Active Matrix Thin Film Transistor Integration for an advanced
separations platform
Yueying
Wue
(8/07)
PhD
passed qualifying exams
Dissertation Subject – Thin film dewetting: understanding
instabilities and materials transport in patterned thin films
Jiyoung
Noh
(8/09)
PhD
MS (Korea)
Dissertation Subject – Materials for advanced thin film transistors
for Lab-on-chip applications
Tsiwei
Tang
(8/09)
PhD
MS (China)
Dissertation Subject – Thin film dewetting: understanding
instabilities and materials transport in patterned thin films
Jason D.
Fowlkes – 8/02 - 8/04
Yinfeng
Guan – 9/05 – 8/08
Steven
Randolph – 11/05 – 8/07
Daryl A.
Smith – 6/07- 2/08
Joo Hyon
Noh – 4/09-present
Matthew
Lassiter – 9/09-present
Jason D.
Fowlkes – 8/04 – 11/07
Anatoli
Melechko – 8/05 – 8/07
1.
Helped lead an effort to
develop a nanofabrication facility, the Joint Institute of Nanoscale
Imaging and Fabrication (JINIFAB). Other members of the leadership
team include: Michael
Simpson (MSE), David C. Joy (BCMB), Syed Islam (ECE), and Gary
Sayler (BCMB).
The facility was an initiative of the Provost and is designed to be
a University Center that will facilitate nanoscience research at the
University of Tennessee.
The facility consists of the following equipment:
1) electron beam lithography system, 2) plasma enhanced
chemical vapor deposition system, 3) reactive ion etching system, 4)
contact optical lithography system, 4) electron beam evaporator, 5)
ancillary photoresist processing equipment, and 6) metrology
equipment.
2.
I have
recently taken a joint position at the ORNL Center for Nanophase
Materials Science to help direct research in the Nanofabrication
Research Laboratory.
This is a ~ 10,000 square foot nanofabrication clean space.
7. Book Review “Concise Guide to Materials Science and Engineering” for McGraw-Hill Co. (7/11/03).
Professional Societies (*active)
Materials Research Society (MRS)*
American
Vacuum Society (AVS)*
ASM/TMS
1. Materials Research Society -- Spring Meeting 2000 – Electroluminescence Session Chair of the Flat Panel Display Materials Symposium
2.
Institute of Electrical and Electronics
Engineer (IEEE) --
3.
Organizing Committee for Materials
Development in Liquid Crystal & Electroluminescent Displays as part
of the XII International Materials Research Conference,
4. Center for Nanophase Materials Science Workshops (CNMS) (Oak Ridge National Laboratory) – have participated in from 2002-2004. The workshops were designed to develop focus research areas for CNMS. I participated in the nanofabrication focus groups.
5.
American Vacuum Society – 51st
International American Vacuum Society Conference,
6.
American Vacuum Society (AVS) – 52st
International American Vacuum Society Conference,
7. AVS Thin Film Division Executive committee member (2005- 2006), 2008-2010
8. AVS 2005 Thin Film Division program vice chair for the 53rd International meeting.
9. AVS Thin Film Division program chair – 2007 – 2008 (oversight over ~ 10-12 sessions for the International AVS meeting).
10. Established a $50,000 endowment to fund the “Paul H. Holloway Young Investigator Award” in the Thin Film Division of AVS.
Journal Referee
Journal of
Applied Physics, Journal of Vacuum Science and Technology, Journal
of The Electrochemical Society,
Journal of Physics and Chemistry of Solids, Thin Solid Films,
Applied Physics Letters, Journal of Luminescence, Journal of
Materials Science, Microscopy and Microanalysis, Scanning,
Nanotechnology
Consultant
KLA Tencor,
Advanced Vision Technologies, nth Tech Corporation, Elesci
Corporation, Xidex Corporation, Biophan, Agile Engineering,
Omniprobe
References:
Dr. Paul
H. Holloway –
Dr.
Michael Simpson –
Dr.
Satosh Kurinec – Rochester Institute of Technology