Philip D. Rack |
UT office (865)
974-5344 ORNL office (865) 241-1598 fax (865) 974-4115 |
Seung-Ik Jun, Anatoli V. Melechko, Timothy E. Mcknight, Michael L. Simpson, Philip D. Rack, DC substrate bias effects on amorphous silicon sputter deposited films and integration and characterization of a sputter deposited thin film transistor array, Applied Physics Letters Vol. 87, No. 13, pp. 132108-1-3 (September 2005).
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